Ultrapure Water System for HANKING’s Microelectronics and Silicon Wafer Cleaning

electronic, chip, integrated circuit

As a revolutionary new technology, MEMS’s development is a key aspect for the development of China’s science and technology, and its industrial prospects are inestimable....




 

  Ultrapure Water System for HANKING’s Microelectronics and Silicon Wafer Cleaning

  Background:

  When smart phones, automotive electronics, robotics and drones have quietly emerged in the whole world, MEMS is also coming into people’s sight. MEMS (Micro Electromechanical System), is a high-tech device with the size of millimeters or even smaller, mainly consisting of sensors, actuators (executor) and micro-energy. Microelectronics is mainly divided into four categories: MEMS sensor technology, MEMS bio-technology, MEMS optical scanners and MEMS radio-frequency technology, in which MEMS sensor technology is in hot development in China at present. As a revolutionary new technology, MEMS’s development is a key aspect for the development of China’s science and technology, and its industrial prospects are inestimable.

  Hanking Electronics (Liaoning) Co., Ltd. is a high-tech Sino-US joint venture with MEMS sensor design and manufacturing as its core. The main business is MEMS high-end sensors and its supporting electronic products, and RIGHTLEDER provides ultrapure water systems for silicon wafer cleaning.

  Project Contents:

  RIGHTLEDER provides ultrapure water system for silicon wafer cleaning. The product water meets TypeE-1.2 of US Standard ASTM D5127 that pure water quality for electronic and semiconductor industry, which is higher than China national electronic grade ultrapure water standard GBT11446.1-1997EW-Ⅰ.

  Project Introduction:

  Project Process: raw water-pretreatment-double stage RO-degassing systems-polished mixed bed-terminal particle remover

  Silicon wafers are absolutely necessary in the design and manufacture of MEMS chips. According to the standard for cleaning water used in silicon wafer, RIGHTLEDER provides a customized process solution that meets US-standard electronic ultrapure water, including TOC (total organic carbon) and DO (dissolved oxygen) and other indicators that are in high requirements. A degassing system is set up in this process to remove soluble gases, especially carbon dioxide (high contents will cause a drop in pH), so that to ensure the purity of the produced ultrapure water. A higher relative content of TOC (total organic carbon) in ultrapure water systems will affect device performance, which is the reason to set TOC remover. At last, a terminal filtration system is adopted to avoid the secondary pollution when ultrapure water is used and to ensure high water quality requirements for particulate matters.

  RIGHTLEDER chooses the BOT model (build-operate-transfer) for this project. Deposit is paid in advance and operating expenses are paid monthly, and the operating and maintenance period is five years. During this period, all operating and maintenance works are undertaken by RIGHTLEDER. Ultrapure water, which reaches Grade 1.2 of the U.S. Standard, can be utilized with less investment in the early stage of this project. The equipment will be transferred after the five-year expiration. As the BOT model has some characteristics of high-tech requirements, large scale, long project cycle and operating period, which also leads in the difficulty and risk to this project. Therefore, it requires a higher level of technology for the construction company.

  EDI Ultrapure Water Equipment of RIGHTLEDER

  Process Advantages:

  1. The ultrapure water special membrane is adopted in the system. Its membrane surface polymer grafting technology is not only resistant to acid and alkali cleaning as well as high pollution, but also owns the features of ion migration acceleration, which can make the produced water below 20PPB;

  2. The system has a high stability and automation so that the produced water quality is stable. The PLC intelligent program is utilized to provide a flexible and convenient operation for users;

  3. Various indicators are monitored strictly. Only a few companies can meet the produced ultrapure water indicators of U.S. Standard;

  The Entire Ultrapure Water System of Hanking Microelectronics Project

  With the continuous enrichment of people’s life, China’s MEMS market is gradually expanding. At the same time, the microelectronics industry is facing technical challenges. RIHGTLEDER not only insists on improving and innovating in technology, but also put customers as the first consideration in the post maintenance. In the future, RIGHTLEDER will make contribution to the domestic microelectronics industry in many ways.